Multi-zone gas distribution system for a treatment system
US8715455B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 6, 2007 |
| Grant date | May 6, 2014 |
| Priority date | — |
| Expiry date | Aug 2, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2001
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A treatment system is described for exposing a substrate to various processes. Additionally, a gas distribution system is configured to be coupled to and utilized with the treatment system in order to distribute process material above the substrate is provided. The treatment system includes a process chamber, a radical generation system coupled to the process chamber, a gas distribution system coupled to the radical generation system and configured to distribute reactive radicals above a substrate, and a temperature controlled pedestal coupled to the vacuum chamber and configured to support the substrate. The gas distribution system is configured to efficiently transport radicals to the substrate and distribute the radicals above the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.