Process for fabricating an acoustic wave resonator comprising a suspended membrane
US8715517B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 8, 2011 |
| Grant date | May 6, 2014 |
| Priority date | — |
| Expiry date | Feb 18, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/021
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A process for fabricating an acoustic wave resonator comprising a suspended membrane comprising a piezoelectric material layer, comprises the following steps: production of a first stack comprising at least one layer of first piezoelectric material on the surface of a first substrate; production of a second stack comprising at least one second substrate; production of at least one non-bonding initiating zone by deposition or creation of particles of controlled sizes leaving the surface of one of said stacks endowed locally with projecting nanostructures before a subsequent bonding step; direct bonding of said two stacks creating a blister between the stacks, due to the presence of the non-bonding initiating zone; and, thinning of the first stack to eliminate at least the first substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.