Mirror for guiding a radiation bundle

US8717531B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Severin Waldis · Aalen, DE
• Florian Bach · Oberkochen, DE
• Daniel Benz · Winnenden, DE
• Armin Werber · Gottenheim, DE
• Wilfried Noell · Neuchâtel, CH
• Dirk Heinrich Ehm · Beckingen, DE
• Stefan Wiesner · Lauchheim, DE
• Dieter Kraus · Munich, DE

Key dates

• Filing date: Feb 18, 2010
• Grant date: May 6, 2014
• Expiry date: Oct 25, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B5/0891
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A mirror serves for guiding a radiation bundle. The mirror has a basic body and a coating of a reflective surface of the basic body, the coating increasing the reflectivity of the mirror. A heat dissipating device serves for dissipating heat deposited in the coating. The heat dissipating device has at least one Peltier element. The coating is applied directly on the Peltier element. A temperature setting apparatus has at least one temperature sensor for a temperature of the reflective surface. A regulating device of the Temperature setting apparatus can be connected to the at least one Peltier element and is signal-connected to the at least one temperature sensor. The result is a mirror in which a heat dissipating capacity of the heat dissipating device is improved.