Dieter Kraus
11Patents
4h-index
30Co-inventors
56Inventor score
Filing activity: Aug 14, 2008 → Aug 23, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7868263B2 | Percussion hand-held power tool with contactless manual switch located in side handle | Performing Operations; Transporting | 8 | Active |
| US9272408B2 | Hand-held machine tool | Performing Operations; Transporting | 6 | Active |
| US8382301B2 | Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination | Physics | 5 | Active |
| US8953145B2 | Detection of contaminating substances in an EUV lithography apparatus | Physics | 4 | Active |
| US7911598B2 | Method for cleaning an EUV lithography device, method for measuring the residual gas atmosphere and the contamination and EUV lithography device | Physics | 3 | Active |
| US8054446B2 | EUV lithography apparatus and method for determining the contamination status of an EUV-reflective optical surface | Physics | 2 | Active |
| US8585224B2 | Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination | Physics | 2 | Active |
| US9046794B2 | Cleaning module, EUV lithography device and method for the cleaning thereof | Physics | 2 | Active |
| US8885141B2 | EUV lithography device and method for processing an optical element | Physics | 1 | Active |
| US8717531B2 | Mirror for guiding a radiation bundle | Physics | 1 | Active |
| US11784527B2 | Linear motor stator arrangement with external convective forced cooling | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.