Daniel Benz
6Patents
1h-index
12Co-inventors
40Inventor score
Filing activity: Mar 27, 2007 → Jun 25, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8767176B2 | Microlithographic projection exposure apparatus | Physics | 4 | Active |
| US8797507B2 | Illumination system of a microlithographic projection exposure apparatus having a temperature control device | Physics | 1 | Active |
| US9523922B2 | Illumination system of a microlithographic projection exposure apparatus having a temperature control device | Physics | 1 | Active |
| US8241019B2 | Pump element and pump having such a pump element | Mechanical Engineering; Lighting; Heating | 1 | Active |
| US8717531B2 | Mirror for guiding a radiation bundle | Physics | 1 | Active |
| US9535336B2 | Microlithographic projection exposure apparatus | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.