Optimized activation prevention mechanism for a gas delivery system
US8720478B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 27, 2011 |
| Grant date | May 13, 2014 |
| Priority date | — |
| Expiry date | Sep 6, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7069
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A mechanism for implementing at least one of activation and deactivation of a gas valve that is coupled to an input manifold of a processing chamber is provided. The mechanism includes a toggle arm disposed in one of a toggle activation position and a toggle deactivation position. The mechanism also includes a toggle operated switch coupled to the toggle arm and the gas valve. The toggle operated switch is disposed on top of the gas valve and the toggle arm is disposed on top of the toggle operated switch so as to minimize a footprint of an assembly that comprises the gas valve, the toggle operated switch, and the toggle arm. Thus, the process gas flow flows through the gas valve when the toggle arm is in the toggle activation position and is inhibited from flowing into the gas valve when the toggle arm is in the toggle deactivation position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.