Patent · US Active

Tunable MEMS device and method of making a tunable MEMS device

US8723277B2 · kind B2 · utility

12Cited by

2References

30Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Alfons Dehe · Reutlingen, DE
Martin Wurzer · Munich, DE
Christian Herzum · Starnberg, DE
Wolfgang Klein · Zorneding, DE
Stefan Barzen · Munich, DE

Key dates

Filing date	Feb 29, 2012
Grant date	May 13, 2014
Priority date	—
Expiry date	Jul 11, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH04R19/04
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

A tunable MEMS device and a method of manufacturing a tunable MEMS device are disclosed. In accordance with an embodiment of the present invention, a semiconductor device comprises a substrate, a moveable electrode and a counter electrode. The moveable electrode or the counter electrode comprises a first region and a second region, wherein the first region is isolated from the second region, wherein the first region is configured to be tuned, wherein the second region is configured to provide a sensing signal or control a system, and wherein the moveable electrode and the counter electrode are mechanically connected to the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.