Martin Wurzer
12Patents
6h-index
15Co-inventors
59Inventor score
Filing activity: Nov 30, 2009 → Apr 28, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8983097B2 | Adjustable ventilation openings in MEMS structures | Electricity | 26 | Active |
| US9002037B2 | MEMS structure with adjustable ventilation openings | Electricity | 17 | Active |
| US8723277B2 | Tunable MEMS device and method of making a tunable MEMS device | Electricity | 12 | Active |
| US8428286B2 | MEMS microphone packaging and MEMS microphone module | Electricity | 12 | Active |
| US9409763B2 | MEMS device and method of making a MEMS device | Electricity | 10 | Active |
| US9540226B2 | System and method for a MEMS transducer | Electricity | 6 | Active |
| US9580299B2 | MEMS device and method of making a MEMS device | Electricity | 4 | Active |
| US9591408B2 | Adjustable ventilation openings in MEMS structures | Electricity | 3 | Active |
| US9210516B2 | Packaged MEMS device and method of calibrating a packaged MEMS device | Electricity | 2 | Active |
| US9673785B2 | Packaged MEMS device comprising adjustable ventilation opening | Electricity | 1 | Active |
| US11528545B2 | Single-ended readout of a differential MEMS device | Electricity | 0 | Active |
| US9284184B2 | MEMS device and method of making a MEMS device | General | 0 | Revoked |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.