Substrate container with fluid-sealing flow passageway
US8727125B2 · kind B2 · utility
11Cited by
33References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 5, 2008 |
| Grant date | May 20, 2014 |
| Priority date | — |
| Expiry date | Dec 26, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67126
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.