Detector for use in charged-particle microscopy
US8735849B2 · kind B2 · utility
3Cited by
17References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 14, 2012 |
| Grant date | May 27, 2014 |
| Priority date | — |
| Expiry date | Sep 21, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of investigating a sample using a charged-particle microscope is disclosed. By directing an imaging beam of charged particles at a sample, a resulting flux of output radiation is detected from the sample. At least a portion of the output radiation is examined using a detector, the detector comprising a Solid State Photo-Multiplier. The Solid State Photo-Multiplier is biased so that its gain is matched to the magnitude of output radiation flux.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.