Patent · US Active

MEMS resonator devices

US8742873B2 · kind B2 · utility

0Cited by

23References

7Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Bernhard Winkler · Birkenfeld, DE
Florian Schoen · Altdorf, DE
Mohsin Nawaz · Itasca, US

Key dates

Filing date	Jun 27, 2013
Grant date	Jun 3, 2014
Priority date	—
Expiry date	Jun 27, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH03H9/2431
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

Embodiments are related to micro-electromechanical system (MEMS) devices, systems and methods. In one embodiment, a MEMS resonating device comprises a resonator element configured to provide timing; and at least one passive temperature compensation structure arranged on the resonator element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.