Movable body apparatus, exposure apparatus and pattern formation apparatus, and device manufacturing method
US8760622B2 · kind B2 · utility
11Cited by
20References
45Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 10, 2008 |
| Grant date | Jun 24, 2014 |
| Priority date | — |
| Expiry date | Mar 12, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70775
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A movable body apparatus is equipped with a Y measuring system equipped with an encoder and an interferometer that measure the position of a stage in one axis (Y-axis) direction. The interferometer irradiates a reflection surface arranged on the stage with a measurement light close to a measurement light of the encoder, and receives its reflected light. In this case, the encoder and the interferometer commonly use an optical member fixed to the stage. Accordingly, the Y interferometer and the Y encoder have substantially the equal measurement axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.