Method for examining a measurement object, and apparatus
US8769711B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 30, 2006 |
| Grant date | Jul 1, 2014 |
| Priority date | — |
| Expiry date | Mar 24, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q30/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a method for examining a measurement object (2, 12), in which the measurement object (2, 12) is examined by means of scanning probe microscopy using a measurement probe (10) of a scanning probe measurement device, and in which at least one subsection (1) of the measurement object (2, 12) is optically examined by an optical measurement system in an observation region associated with the optical measurement system, wherein a displacement of the at least one subsection (1) of the measurement object (2, 12) out of the observation region which is brought about by the examination by means of scanning probe microscopy is corrected in such a way that the at least one displaced subsection (1) of the measurement object (2, 12) is arranged back in the observation region by means of a readjustment device which processes data signals that characterize the displacement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.