Multizone control of lamps in a conical lamphead using pyrometers
US8772055B1 · kind B1 · utility
2Cited by
8References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 12, 2013 |
| Grant date | Jul 8, 2014 |
| Priority date | — |
| Expiry date | Mar 12, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2005/106
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and apparatus for processing a semiconductor substrate is described. The apparatus is a process chamber having an optically transparent upper dome and lower dome. Vacuum is maintained in the process chamber during processing. The upper dome is thermally controlled by flowing a thermal control fluid along the upper dome outside the processing region. Thermal lamps are positioned proximate the lower dome, and thermal sensors are disposed among the lamps. The lamps are powered in zones, and a controller adjusts power to the lamp zones based on data received from the thermal sensors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.