Inventor · Santa Clara, CA, US

Balasubramanian Ramachandran

44Patents
8h-index
92Co-inventors
78Inventor score

Filing activity: Mar 16, 2001 → Dec 14, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US6674999B2 Dynamically varying linearity system for an RF front-end of a communication device Electricity 74 Expired
US7112763B2 Method and apparatus for low temperature pyrometry useful for thermally processing silicon wafers Electricity 46 Expired
US7127367B2 Tailored temperature uniformity Electricity 22 Expired
US6897131B2 Advances in spike anneal processes for ultra shallow junctions Electricity 18 Expired
US6888104B1 Thermally matched support ring for substrate processing chamber Electricity 18 Expired
US7515929B2 Receiver for a multimode radio Electricity 13 Active
US7398693B2 Adaptive control method for rapid thermal processing of a substrate Electricity 11 Active
US7502625B2 Integrated multi-band transceiver for use in mobile communication device Electricity 8 Active
US9347132B2 Optical endpoint detection system Physics 7 Active
US9914999B2 Oxidized showerhead and process kit parts and methods of using same Chemistry; Metallurgy 5 Active
US7951728B2 Method of improving oxide growth rate of selective oxidation processes Electricity 5 Active
US8109669B2 Temperature uniformity measurement during thermal processing Physics 5 Active
US7130596B2 Dynamically varying linearity system for an RF front-end of a communication device Electricity 5 Expired
US10062598B2 Thermal processing susceptor Chemistry; Metallurgy 4 Active
US9532401B2 Susceptor support shaft with uniformity tuning lenses for EPI process Electricity 4 Active
US9117661B2 Method of improving oxide growth rate of selective oxidation processes Electricity 3 Active
US8513626B2 Method and apparatus for reducing patterning effects on a substrate during radiation-based heating Electricity 3 Active
US9870919B2 Process chamber having separate process gas and purge gas regions Electricity 3 Active
US8546271B2 Method of improving oxide growth rate of selective oxidation processes Electricity 3 Active
US7778533B2 Semiconductor thermal process control Electricity 2 Expired
US8772055B1 Multizone control of lamps in a conical lamphead using pyrometers Physics 2 Active
US10930543B2 Thermal processing susceptor Chemistry; Metallurgy 2 Active
US7415264B2 Low noise filter for a wireless receiver Electricity 2 Expired
US8953716B1 DC offset estimation and compensaton for wideband systems Electricity 2 Active
US11493378B2 Fuel level measurement system for a machine Emerging Cross-Sectional Technologies 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.