Optical waveguide and coupler apparatus and method of manufacturing the same
US8791405B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 25, 2010 |
| Grant date | Jul 29, 2014 |
| Priority date | — |
| Expiry date | May 27, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12104
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Optical waveguide and coupler devices and methods include a trench formed in a bulk semiconductor substrate, for example, a bulk silicon substrate. A bottom cladding layer is formed in the trench, and a core region is formed on the bottom cladding layer. A reflective element, such as a distributed Bragg reflector can be formed under the coupler device and/or the waveguide device. Because the optical devices are integrated in a bulk substrate, they can be readily integrated with other devices on a chip or die in accordance with silicon photonics technology. Specifically, for example, the optical devices can be integrated in a DRAM memory circuit chip die.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.