Patent · US Active

Laser cooling of modified SOI wafer

US8794010B2 · kind B2 · utility

2Cited by
5References
24Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 13, 2010
Grant dateAug 5, 2014
Priority date
Expiry dateDec 23, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A laser cooling system includes a substrate, an REO layer of single crystal rare earth oxide including at least one rare earth element positioned on the surface of the substrate, and an active layer of single crystal semiconductor material positioned on the REO layer to form a semiconductor-on-insulator (SOI) device. Light guiding structure is at least partially formed by the REO layer so as to introduce energy elements into the REO layer and produce cooling by anti-Stokes fluorescence. The active layer of single crystal semiconductor material is positioned on the REO layer in proximity to the light guiding structure so as to receive the cooling.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.