Method and system for synchronizing chamber down times by controlling transport sequencing in a process tool

US8798778B2 · kind B2 · utility

Assignee

• Advanced Micro Devices, Inc. · US

Inventor

• Kilian Schmidt · Dresden, DE

Key dates

• Filing date: Dec 21, 2009
• Grant date: Aug 5, 2014
• Expiry date: Sep 17, 2031

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P90/80
• WIPO field: Control
• WIPO sector: Instruments

Abstract

A cluster tool may be operated on the basis of an enhanced sequencing regime in which the supply of substrates is controlled such that a planned time of maintenance is reached for two or more process chambers simultaneously. Consequently, the occurrence of non-correlated sequential down times of various process chambers may be significantly reduced, thereby enhancing throughput and availability of complex cluster tools.