Multiple dimension position sensor
US8803513B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 5, 2012 |
| Grant date | Aug 12, 2014 |
| Priority date | — |
| Expiry date | May 15, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B7/003
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.