Holder device, chamber apparatus, and extreme ultraviolet light generation system
US8809821B2 · kind B2 · utility
0Cited by
5References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 14, 2012 |
| Grant date | Aug 19, 2014 |
| Priority date | — |
| Expiry date | Sep 14, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/0092
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A holder device for holding an optical element includes a holder having first and second members to sandwich the optical element therebetween, and a sealing member for creating a seal between the second member and the optical element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.