Patent · US Active

Method of processing of an object

US8816303B2 · kind B2 · utility

1Cited by

6References

40Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Josef Biberger · Rottenburg a. d. Laaber, DE
Ralph Pulwey · Aalen, DE
Jaroslaw Paluszynski · Oberkochen, DE
Dietmar Doenitz · Aalen, DE
Hans Mathèe · Heidelberg, DE
Michael L. Steigerwald · Bound Brook, US

Key dates

Filing date	Jun 20, 2011
Grant date	Aug 26, 2014
Priority date	—
Expiry date	Jun 20, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/30494
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method of processing of an object comprises scanning a particle beam across a surface of the object and detecting electrons emerging from the object due to the scanning; determining a height difference between the surface of the object and a predetermined surface for each of plural of locations on the surface of the object based on the detected electrons; determining a processing intensity for each of the plural locations on the surface of the object based on the determined height differences; and directing a particle beam to the plural locations based on the determined processing intensities, in order to remove material from or deposit material on the object at the plural locations.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.