Wafer's ambiance control
US8827695B2 · kind B2 · utility
12Cited by
6References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 5, 2009 |
| Grant date | Sep 9, 2014 |
| Priority date | — |
| Expiry date | Apr 23, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/135
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor manufacturing system, an interface system, a carrier, and a method for providing an ambient controlled environment is disclosed. The semiconductor manufacturing system comprises a plurality of process chambers; at least one interface system, wherein the interface system includes a first ambient control element; at least one carrier, wherein the carrier comprises a second ambient control element; and a control module coupled to the plurality of process chambers, the at least one interface system, and the at least one carrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.