Inspection method and apparatus
US8830455B2 · kind B2 · utility
0Cited by
18References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 19, 2010 |
| Grant date | Sep 9, 2014 |
| Priority date | — |
| Expiry date | Jan 7, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/95623
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an aspect, an inspection method for detecting the presence or absence of a defect on an object, the object comprising a recess having a physical depth, is disclosed. The method includes directing radiation at the object, the radiation having a wavelength that is substantially equal to twice an optical depth of the recess, detecting radiation that is re-directed by the object or a defect on the object, and determining the presence or absence of a defect from the re-directed radiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.