Luigi Scaccabarozzi
12Patents
3h-index
46Co-inventors
52Inventor score
Filing activity: May 20, 2010 → Jan 14, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10228615B2 | Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane | Physics | 9 | Active |
| US10139725B2 | Lithographic apparatus | Physics | 6 | Active |
| US10698312B2 | Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane | Physics | 6 | Active |
| US9606445B2 | Lithographic apparatus and method of manufacturing a device | Physics | 3 | Active |
| US8477285B2 | Particle cleaning of optical elements for microlithography | Physics | 2 | Active |
| US9298110B2 | Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device | Electricity | 2 | Active |
| US10678140B2 | Suppression filter, radiation collector and radiation source for a lithographic apparatus; method of determining a separation distance between at least two reflective surface levels of a suppression filter | Electricity | 2 | Active |
| US9563137B2 | Lithographic apparatus and device manufacturing method | Electricity | 1 | Active |
| US9488922B2 | Methods and apparatus for inspection of articles, EUV lithography reticles, lithography apparatus and method of manufacturing devices | Physics | 0 | Active |
| US8405825B2 | Method of detecting a particle and a lithographic apparatus | Physics | 0 | Active |
| US9122178B2 | Object inspection systems and methods | Physics | 0 | Active |
| US8830455B2 | Inspection method and apparatus | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.