Vertical probe assembly with air channel

US8836356B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• David M. Audette · Webster, US
• Dustin M. Fregeau · South Burlington, US
• David L. Gardell · Saint Albans, US
• Daniel J. Murphy · Eden Prairie, US
• Grant Wagner · Jericho, US

Key dates

• Filing date: Dec 12, 2011
• Grant date: Sep 16, 2014
• Expiry date: Oct 15, 2032

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2891
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A vertical probe assembly includes an upper die; a lower die; a plurality of probes, the probes including an electrically conductive material, wherein the probes extend from the upper die through the lower die; and an air channel located between the upper die and the lower die, such that airflow through the air channel passes through the plurality of probes.