Method of and apparatus for multiple channel flow ratio controller system
US8849466B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 4, 2011 |
| Grant date | Sep 30, 2014 |
| Priority date | — |
| Expiry date | Nov 1, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/2529
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A four channel gas delivery system comprising: an inlet channel; four outlet channels; four flow sensors; four control valves, each valve being arranged so as to control the flow from the inlet channel through a corresponding one of the outlet channels; a flow ratio control system configured so as to control the flow from the inlet channel through the corresponding outlet channels so that the following flow ratios are controlled: (a) a first ratio of flows between the outlet channels of a first pair; (b) a second ratio of flows between the outlet channels of a second pair; and (c) a third ratio of flows between the first pair of outlet channels relative to the second pair of outlet channels; wherein the third ratio is controlled by generating at least one bias signal respectively applied to at least one pair of valves, the bias signal being a function of a predetermined set point of the third ratio and measured values of the third ratio.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.