Dissolution rate monitor
US8852967B2 · kind B2 · utility
1Cited by
1References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 20, 2012 |
| Grant date | Oct 7, 2014 |
| Priority date | — |
| Expiry date | Apr 22, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/26
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A multiple channel site-isolated reactor system and method are described. The system contains a reactor block with a plurality of reactors. Input lines are coupled to each reactor to provide a fluid to the respective reactors. A sealing element associated with each reactor contacts a surface of a substrate disposed below the reactor block, which defines isolated regions on the surface of the substrate. A dissolution rate monitor extends into each reactor to monitor a rate of real-time dissolution of one or more layers on the surface of the substrate when it is disposed proximate to the surface of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.