George Mirth
5Patents
2h-index
11Co-inventors
44Inventor score
Filing activity: Dec 19, 2003 → Dec 23, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9074169B2 | Lithographic tool in situ clean formulations | Chemistry; Metallurgy | 10 | Active |
| US7056824B2 | Electronic device manufacture | Electricity | 2 | Expired |
| US9174323B2 | Combinatorial tool for mechanically-assisted surface polishing and cleaning | Performing Operations; Transporting | 2 | Active |
| US8852967B2 | Dissolution rate monitor | Electricity | 1 | Active |
| US8906709B1 | Combinatorially variable etching of stacks including two dissimilar materials for etch pit density inspection | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.