Dense arrays and charge storage devices
US8853765B2 · kind B2 · utility
28Cited by
209References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 27, 2014 |
| Grant date | Oct 7, 2014 |
| Priority date | — |
| Expiry date | Mar 27, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/00
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive device levels is planarized by chemical mechanical polishing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.