Simultaneous electron detection
US8859966B2 · kind B2 · utility
1Cited by
7References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 12, 2011 |
| Grant date | Oct 14, 2014 |
| Priority date | — |
| Expiry date | Jun 13, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2804
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention provides multiple detectors that detect electrons that have passed through a sample. The detectors preferably detect electrons after the electrons have been passed through a prism that separates electrons according to their energies. Electrons in different energy ranges are then detected by different detectors, with preferably at least one of the detectors measuring the energy lost by the electrons as they pass through the sample. One embodiment of the invention provides EELS on core-loss electrons while simultaneously providing a bright-field STEM signal from low-loss electrons.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.