Method and apparatus for inspecting surface of a disk
US8873031B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 4, 2013 |
| Grant date | Oct 28, 2014 |
| Priority date | — |
| Expiry date | Jun 3, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/95
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A disk surface inspection method for detecting a circle scratch defect, separately from sporadically existing scratch defects. In the method, the sample is irradiated with light, regular reflection light reflected from the sample is detected, scattered light in the vicinity of the regular reflection light is detected separately from the regular reflection light, scattered light, scattered in a high angle direction greater than the direction of the regular reflection light is detected, and the defects on the surface of the sample are detected by processing a regular reflection light detection signal, a low-angle scattered light detection signal and a high-angle scattered light detection signal to extract defect candidates, and regarding the extracted defect candidates, a circumferential defect is extracted based on the ratio of defect candidates in a circumferential direction within a predetermined width in a radial direction from the center of the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.