Patent · US Active

Process tool chemical and gas usage optimization

US8874416B2 · kind B2 · utility

0Cited by

2References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Krishna Vepa · Danville, US
Parris Hawkins · Los Altos, US
Andreas Neuber · Stuttgart, DE

Key dates

Filing date	Nov 30, 2011
Grant date	Oct 28, 2014
Priority date	—
Expiry date	Aug 22, 2032

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P90/02
WIPO fieldControl
WIPO sectorInstruments

Abstract

A resource usage optimization server determines a degradation caused by a first resource. The resource usage optimization server determines a cleaning caused by a second resource. The resource usage optimization server calculates a ratio of the degradation and the cleaning.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.