Electron microscope and sample holder
US8878144B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 1, 2010 |
| Grant date | Nov 4, 2014 |
| Priority date | — |
| Expiry date | Dec 1, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2065
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The electron beam apparatus sample holding means has a diaphragm which is placed on upper and lower sides of a sample to form a cell for separating a gas atmosphere and a vacuum atmosphere of a sample chamber and sealing an ambient atmosphere of the sample; a gas supply means for supplying gas to an inside of the cell; and exhaust means for exhausting gas. The exhaust means includes a gas exhaust pipe provided in the inside of the cell and an openable/closable exhaust hole provided in a sidewall of the sample holding means so as to pass through the cell. The diaphragm is an amorphous film made of light elements which can transmit an electron beam, such as carbon films, oxide films, and nitride films.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.