Charged particle beam imaging assembly and imaging method thereof
US8884224B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 8, 2009 |
| Grant date | Nov 11, 2014 |
| Priority date | — |
| Expiry date | May 15, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/0048
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for enhancing the quality of a charged particle microscopic image of a sample is disclosed. The image is formed by a charged particle beam imaging system. The method comprising: scanning, using a first scanning beam, a surface of the sample in at least one first scan line; and scanning, using a second scanning beam, the sample surface in at least one second scan line, wherein said second scanning beam is scanned across said sample surface during a time interval between the end of said first scan lines and the beginning of the next said first scan lines. Application of the proposed method as a charged particle beam imaging system is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.