Imprint system, imprint method, and non-transitory computer storage medium
US8888920B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 11, 2010 |
| Grant date | Nov 18, 2014 |
| Priority date | — |
| Expiry date | Apr 8, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present invention is an imprint system including an imprint unit transferring a transfer pattern to a coating film formed on a substrate using a template having the transfer pattern formed on a front surface thereof to form a predetermined pattern in the coating film, the imprint system including: a substrate carry-in/out station connected to the imprint unit, capable of keeping a plurality of the substrates, and carrying the substrate into/out of the imprint unit side; and a template carry-in/out station connected to the imprint unit, capable of keeping a plurality of the templates, and carrying the template into/out of the imprint unit side at a predetermined timing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.