Harmonic derived arc detector
US8890537B2 · kind B2 · utility
55Cited by
13References
45Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 21, 2010 |
| Grant date | Nov 18, 2014 |
| Priority date | — |
| Expiry date | Jun 25, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/0206
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.