Filament for electron source
US8896195B2 · kind B2 · utility
2Cited by
5References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 21, 2010 |
| Grant date | Nov 25, 2014 |
| Priority date | — |
| Expiry date | Jan 21, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/06316
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This invention relates to a filament for electron emission cathode which is employed in an electron microscope, a critical dimension examine tool, an electron beam lithograph machine, an electron beam tester and other electron beam related systems as an electron source. Embodiments of the present invention discloses method with which a Re (Rhenium) is used as heat source such that vibration issue of prior tungsten filament can be depressed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.