Positioning system and a method for positioning a substage with respect to a frame
US8896811B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 10, 2010 |
| Grant date | Nov 25, 2014 |
| Priority date | — |
| Expiry date | May 10, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70758
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for positioning a substage, supported by a main stage, relative to a reference object, the substage moveable in a direction between a first and second position relative to the main stage. The method includes positioning the first stage using a passive force system that is activated by positioning the main stage. The passive force system includes two magnet systems, each magnet system being configured to apply a force in the direction to the first stage with respect to the second stage in a non-contact manner, the forces resulting in a resultant force applied to the first stage in the direction by the passive force system. A magnitude and/or a direction of the resultant force depends on the position of the first stage relative to the second stage, and the first stage has a zero-force position between the first and second position in which the resultant force is zero.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.