Patent · US Active

Test apparatus for reflective cavity characterization

US8896837B1 · kind B1 · utility

1Cited by

11References

16Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Joseph M. Ranish · San Jose, US
Joseph R. Johnson · Palo Alto, US
Mehran Behdjat · San Jose, US

Key dates

Filing date	Jun 20, 2013
Grant date	Nov 25, 2014
Priority date	—
Expiry date	Jun 20, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG01N2201/08
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An apparatus for reflectivity measurement is provided. The apparatus generally measures reflectivity characteristics of a reflective surface, such as a reflective cavity of a light array. The apparatus generally comprises a body defining a volume and a light emitting element disposed outside the volume. A sensor coupled to the body detects light reflected from a reflective surface. Various embodiments provide positioning of the apparatus relative to a light array having a reflective cavity.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.