Module and method for producing extreme ultraviolet radiation
US8901521B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 25, 2008 |
| Grant date | Dec 2, 2014 |
| Priority date | — |
| Expiry date | Jul 27, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K7/2039
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A module for producing extreme ultraviolet radiation includes a supply configured to supply droplets of an ignition material to a predetermined target ignition position and a laser arranged to be focused on the predetermined target ignition position and to produce a plasma by hitting such a droplet which is located at the predetermined target ignition position in order to change the droplet into an extreme ultraviolet producing plasma. Also, the module includes a collector mirror having a mirror surface constructed and arranged to reflect the radiation in order to focus the radiation on a focal point. A fluid supply is constructed and arranged to form a gas flow flowing away from the mirror surface in a direction transverse with respect to the mirror surface in order to mitigate particle debris produced by the plasma.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.