Dzmitry Labetski
22Patents
3h-index
65Co-inventors
62Inventor score
Filing activity: Sep 17, 2007 → Oct 16, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10222701B2 | Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method | Electricity | 10 | Active |
| US8368032B2 | Radiation source, lithographic apparatus, and device manufacturing method | Physics | 5 | Active |
| US8115900B2 | Lithographic apparatus and device manufacturing method | Electricity | 3 | Active |
| US8901521B2 | Module and method for producing extreme ultraviolet radiation | Electricity | 3 | Active |
| US8755032B2 | Radiation source and lithographic apparatus | Electricity | 2 | Active |
| US9715174B2 | Droplet generator, EUV radiation source, lithographic apparatus, method for generating droplets and device manufacturing method | Electricity | 1 | Active |
| US9671698B2 | Fuel stream generator, source collector apparatus and lithographic apparatus | Emerging Cross-Sectional Technologies | 1 | Active |
| US9013679B2 | Collector mirror assembly and method for producing extreme ultraviolet radiation | Physics | 1 | Active |
| US9310689B2 | Radiation source and lithographic apparatus | Electricity | 1 | Active |
| US9113539B2 | Radiation source | Electricity | 1 | Active |
| US8220315B2 | Gas gauge, lithographic apparatus and device manufacturing method | Physics | 1 | Active |
| US9753383B2 | Radiation source and lithographic apparatus | Emerging Cross-Sectional Technologies | 1 | Active |
| US10955749B2 | Guiding device and associated system | Electricity | 0 | Active |
| US12389519B2 | Guiding device and associated system | Electricity | 0 | Active |
| US11822252B2 | Guiding device and associated system | Electricity | 0 | Active |
| US9363879B2 | Module and method for producing extreme ultraviolet radiation | Electricity | 0 | Active |
| US8405055B2 | Source module, radiation source and lithographic apparatus | Electricity | 0 | Active |
| US8749756B2 | Lithographic apparatus and device manufacturing method | Electricity | 0 | Active |
| US8711325B2 | Method and system for determining a suppression factor of a suppression system and a lithographic apparatus | Physics | 0 | Active |
| US11874608B2 | Apparatus for and method of reducing contamination from source material in an EUV light source | Physics | 0 | Active |
| US10394141B2 | Radiation source and lithographic apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
| US9091944B2 | Source collector, lithographic apparatus and device manufacturing method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.