Patent · US Active

Method of manufacturing a film bulk acoustic resonator with a loading element

US8910355B2 · kind B2 · utility

9Cited by

7References

19Claims

0Family size

Assignee

International Business Machines Corporation · US

Inventors

James W. Adkisson · Jericho, US
Panglijen Candra · South Burlington, US
Thomas J. Dunbar · Burlington, US
Jeffrey P. Gambino · Gresham, US
Mark D. Jaffe · Shelburne, US
Anthony K. Stamper · Williston, US
Randy L. Wolf · South Burlington, US

Key dates

Filing date	Dec 12, 2011
Grant date	Dec 16, 2014
Priority date	—
Expiry date	Apr 18, 2032

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49155
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

Manufacturing a semiconductor structure including modifying a frequency of a Film Bulk Acoustic Resonator (FBAR) device though a vent hole of a sealing layer surrounding the FBAR device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.