Patent · US Active

Method for measurement of a power device

US8922229B2 · kind B2 · utility

1Cited by

4References

19Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Botho Hirschfeld · Dresden, DE
Stojan Kanev · Sacka, DE

Key dates

Filing date	Jun 16, 2010
Grant date	Dec 30, 2014
Priority date	—
Expiry date	Aug 4, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2891
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method is disclosed for the measurement of a power device in a prober, which serves the examination and testing of such components. In the process, a power device is held by a chuck, and at least one electric probe is held by a probe holder, and optionally, the power device or the probe is positioned each relative to the other using a positioning device with an electrical drive, and contacts the power device. At the same time, an electrical connection remains between the probe to a signal unit with which a power signal is sent out or received, is blocked and only unblocked when it is determined that the contact between probe 26 and contact area is established.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.