Patent · US Active

Thermally zoned substrate holder assembly

US8927907B2 · kind B2 · utility

32Cited by

23References

11Claims

0Family size

Assignee

TOKYO ELECTRON LIMITED · JP

Inventors

Steven Fink · Mesa, US
Eric J. Strang · Chandler, US

Key dates

Filing date	Nov 30, 2011
Grant date	Jan 6, 2015
Priority date	—
Expiry date	Nov 30, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T279/23
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A thermally zoned substrate holder including a substantially cylindrical base having top and bottom surfaces configured to support a substrate. A plurality of temperature control elements are disposed within the base. An insulator thermally separates the temperature control elements. The insulator is made from an insulting material having a lower coefficient of thermal conductivity than the base (e.g., a gas- or vacuum-filled chamber).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.