Patent · US Active

Particle beam system and method for operating the same

US8927948B2 · kind B2 · utility

0Cited by

12References

20Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Josef Biberger · Rottenburg a. d. Laaber, DE
Ralph Pulwey · Aalen, DE
Volker Wieczorek · Neu-Ulm, DE

Key dates

Filing date	Apr 10, 2014
Grant date	Jan 6, 2015
Priority date	—
Expiry date	Apr 10, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2602
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A particle beam system includes a charged particle beam source, a beam blanking module connectable to a data network, a focusing lens, a first beam deflection module connectable to the data network, a calculation module configured to determine a deflection time; and an encoding module.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.