Dual resistance heater for phase change devices and manufacturing method thereof
US8952299B2 · kind B2 · utility
5Cited by
33References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 19, 2013 |
| Grant date | Feb 10, 2015 |
| Priority date | — |
| Expiry date | Aug 19, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N70/882
Abstract
A dual resistance heater for a phase change material region is formed by depositing a resistive material. The heater material is then exposed to an implantation or plasma which increases the resistance of the surface of the heater material relative to the remainder of the heater material. As a result, the portion of the heater material approximate to the phase change material region is a highly effective heater because of its high resistance, but the bulk of the heater material is not as resistive and, thus, does not increase the voltage drop and the current usage of the device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.