Probe cards for probing integrated circuits
US8957691B2 · kind B2 · utility
7Cited by
3References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 21, 2011 |
| Grant date | Feb 17, 2015 |
| Priority date | — |
| Expiry date | Jun 5, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/31905
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device includes a probe card, which further includes a chip. The chip includes a semiconductor substrate, a test engine disposed in the chip, wherein the test engine comprises a device formed on the semiconductor substrate, wherein the device is selected from the group consisting essentially of a passive device, an active device, and combinations thereof. A plurality of probe contacts is formed on a surface of the chip and electrically connected to the test engine.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.