Master oscillator—power amplifier drive laser with pre-pulse for EUV light source
US8958143B2 · kind B2 · utility
4Cited by
2References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 3, 2014 |
| Grant date | Feb 17, 2015 |
| Priority date | — |
| Expiry date | Feb 3, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/117
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A device is described herein which may comprise an optical amplifier having a gain band including wavelengths λ1 and λ2, with λ1≠λ2; a pre-pulse seed laser having a tuning module for tuning a pre-pulse output to wavelength λ1; a main pulse seed laser generating a laser output having wavelength, λ2; and a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.