Charged particle beam microscope, sample holder for charged particle beam microscope, and charged particle beam microscopy
US8963102B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 11, 2013 |
| Grant date | Feb 24, 2015 |
| Priority date | — |
| Expiry date | Jan 11, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2614
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus that can capture a rotation series of images of an observation area within a range of −180° to +180° around the x axis thereof, and can capture a rotation series of images of the observation area within a range of −180° to +180° around the y axis thereof. The apparatus includes a sample mounting base having at its tip portion a mounting portion for mounting a sample thereon; a rotating jig having a mounting base holding portion that holds the sample mounting base; a sample holding rod that includes a holding portion that holds the rotating jig; a first rotation control unit that applies, to the sample holding rod, a first rotation within a range of −180° to +180° with the extending direction of the sample holding rod as the axis thereof; and a second rotation control unit that applies, to the rotating jig, a second rotation within a range of ±45° or more with the direction orthogonal to the rotation axis of the first rotation as the axis thereof, the sample mounting base being in a conical or polygonally conical form.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.