Beam line design to reduce energy contamination
US8963107B2 · kind B2 · utility
1Cited by
11References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 12, 2012 |
| Grant date | Feb 24, 2015 |
| Priority date | — |
| Expiry date | Jan 12, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31705
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Methods and apparatus for reducing energy contamination can be provided to a beam line assembly for ion implantation. Protrusions comprising surface areas and grooves therebetween can face neutral trajectories within a line of sight view from the workpiece within the beam line assembly. The protrusions can alter the course of the neutral trajectories away from the workpiece or cause alternate trajectories for further impacting before hitting a workpiece, and thereby, further reduce energy contamination for more sensitive implants.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.